Air Actuated Valves
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Vertical PVD Sputtering System for Particle-Free Coating
- VISTARIS is a vertical, modular PVD sputtering system from SINGULUS, specially designed for particle-free coating processes
- Ideal for applying high-quality carbon coatings on stainless steel bipolar plates.
- VISTARIS also supports deposition of catalyst layers and corrosion-resistant coatings, making it an excellent solution for PEM fuel cells, electrolyzers, and other hydrogen energy applications.
- Scalable coating widths from 0.3 m to 2.5 m enable high-throughput production.
Vertical PVD Sputtering System for Particle-Free Coating
- The VISTARIS PVD from SINGULUS TECHNOLOGIES is a high-performance, vertical inline PVD sputtering system, purpose-built for particle-free thin-film coatings in hydrogen energy applications. Its vertical orientation significantly reduces particulate contamination, making it especially well-suited for carbon coatings and other high-purity layers applied to bipolar plates (BPPs) used in PEM fuel cells and electrolyzers. In these systems, high-performance coatings are essential to enhance corrosion resistance, improve conductivity, and extend the lifetime of critical components.
- At the core of VISTARIS is a modular vacuum chamber design that enables uniform and scalable coating performance. Its vertical, inline sputtering configuration supports substrate widths from 0.3 to 2.5 meters, with optimized throughput for both pilot and mass production environments. The system’s precision substrate carrier allows for single- or double-sided coatings, with independent material selection per side, supporting tailored stacks for catalytic activity and corrosion protection.
- In addition, VISTARIS is engineered for efficient noble metal recycling, with vacuum chambers optimized for maximum material recovery yields. This minimizes losses of precious materials such as platinum, gold, and iridium, enhancing both economic viability and sustainability in large-scale hydrogen system manufacturing.
Key Features and Capabilities
-
Applications:
– Particle-free carbon and corrosion-resistant coatings for PEM electrolyzers and fuel cells
– Coating of BPPs, PTLs, GDLs, MEAs, cathodes, and other stack components
– Parallel processing of multiple substrate formats -
Core Technologies:
– Vertical inline substrate transport for minimized particle contamination
– PVD magnetron sputtering
– DC, pDC, BP and RF process options
– Vacuum pre-treatment for surface activation
– Substrate Heating before and during deposition
– Rotatable cylindrical cathodes for efficient target material use
– Carrier-based transport for flexible substrate handling -
Materials & Coatings:
– C, Au, Pt, Ir, Cr, CrN, and other metal nitrides
– Single- and double-sided deposition, with flexible layer stacks -
Scalability:
– Supports substrates from 0.3 × 0.6 m (lab scale) to 2.5 m width (production scale)
– Maintains high coating uniformity of ±3% across all formats -
Scalble Annual Output:
– Considering a 600 cm² plate size SINGULUS in-line PVD sputter system enables an throughput of 1.0 million bipolar plates per year up to 10.5 million -
Sustainability:
– Vacuum chambers engineered for high noble metal recovery yields
– Reduced material waste and lower production costs
– Full recycling supply chain for noble metals
With its vertical configuration, particle-free coating capabilities, and scalable architecture, VISTARIS PVD is a cutting-edge solution for high-purity, high-efficiency coating processes in industrial hydrogen technology production.
Contact us!
- Challenge our experts to improve your fuel cell stacks, electrolyzer plates, or any precision component—big or small. Get in touch today to discuss your specifications, request samples, or schedule a facility tour.
| Brand | SINGULUS |
Singulus Technologies AG
SINGULUS TECHNOLOGIES is a leading supplier of advanced machinery and systems for high-precision thin-film coating and surface treatment processes. With a global footprint, our technologies are applied across a range of industries—including photovoltaics, semiconductors, medical technology, packaging, glass & automotive, and the rapidly growing battery and hydrogen sectors.
Our core expertise spans a wide range of deposition and surface engineering technologies, including: PVD sputtering, PECVD, Thermal evaporation (e.g., Close-Space Sublimation, CSS), Surface activation and pre-treatment, Wet-chemical and thermal process integration.
In the hydrogen sector, bipolar plates (BPPs) represent a significant portion of the weight and account for a large share of the manufacturing cost of PEM fuel cell and electrolyzer stacks. To enable cost-efficient, high-volume production, advanced coating solutions are essential. These functional coatings directly influence corrosion resistance and interfacial contact resistance—key factors for ensuring long-term durability, high electrical efficiency, and system reliability.
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