Air Actuated Valves
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Hydrogen Back Pressure Regulators
Hydrogen Filter Regulators
Hydrogen Fuel Cell Pressure Regulators
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Hydrogen Tank Valves
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Horizontal PVD Sputtering System for Catalyst Deposition & Corrosion-Resistant Coatings
- GENERIS is a high-throughput, modular PVD sputtering system with horizontal substrate transport,
- Specifically designed for hydrogen technologies such as PEM electrolyzers and fuel cells.
- It enables precise deposition of catalyst layers and corrosion-resistant coatings, making it ideal for advanced energy conversion applications.
Horizontal PVD Sputtering System for Catalyst Deposition & Corrosion-Resistant Coatings
- The GENERIS PVD from SINGULUS TECHNOLOGIES is a high-performance, horizontal inline PVD sputtering system purpose-built for highly controlled thin-film coatings in hydrogen energy applications. It is especially suited for the production of bipolar plates (BPPs) used in PEM electrolyzers and fuel cells, where high-performance coatings are essential to enhance corrosion resistance, improve conductivity, and extend the lifetime of these critical components.
- At the core of the system is a modular vacuum chamber design that delivers high throughput and uniform thin-film coatings. With its dynamic inline sputtering process, the GENERIS PVD achieves ±3% layer thickness uniformity across substrates up to 1.6 meters wide—critical for consistent performance in PEM electrolyzers.
- A versatile substrate carrier system allows for flexible configurations, including single- or double-sided coating with independent material selection per side, enabling optimized stacks for catalytic efficiency and corrosion protection.
Moreover, the system is engineered for efficient noble metal recycling, with vacuum chambers optimized for the highest material recovery yields. This design significantly reduces loss of precious materials like platinum, gold, and iridium, ensuring both environmental and economic efficiency.
Key Features and Capabilities
-
Applications:
– Metallization & Corrosion coatings for PEM electrolyzers and fuel cells
– BBP, PTL, GDL, MEA, Cathodes and other stack components
– Parallel processing of several substrates, different substrate sizes possible -
Core Technologies:
– Horizontal inline substrate transport
– PVD magnetron sputtering (bottom up / top down)
– Vacuum pre-treatment to remove surface molecules
– Substrate Heating Before and During Process
– Rotatable cylindrical cathodes for highest utilization of target material -
Materials & Coatings:
– Au, Pt, Ir, C, Cr, CrN, and other metal nitrides
– Single- and double-sided layer deposition -
Scalability:
– Maintains ±3% uniformity of layer thickness across all formats
– Supports substrates from 0.4 × 1.0 m (lab scale) to 1.4 × 1.6 m (production scale) -
Scalble Annual Output:
– Considering a 600 cm² plate size SINGULUS in-line PVD sputter system enables an throughput of 3.0 million bipolar plates per year up to 10.5 million -
Sustainability:
– Vacuum chambers engineered for high noble metal recycling yields
– Reduced material waste and lower production costs
– Full recycling supply chain for noble metals
With its scalable platform and precision coating capabilities, GENERIS PVD is an ideal solution for industrial-scale hydrogen component manufacturing.
Contact us
- Challenge our experts to improve your fuel cell stacks, electrolyzer plates, or any precision component—big or small. Get in touch today to discuss your specifications, request samples, or schedule a facility tour.
| Brand | SINGULUS |
Singulus Technologies AG
SINGULUS TECHNOLOGIES is a leading supplier of advanced machinery and systems for high-precision thin-film coating and surface treatment processes. With a global footprint, our technologies are applied across a range of industries—including photovoltaics, semiconductors, medical technology, packaging, glass & automotive, and the rapidly growing battery and hydrogen sectors.
Our core expertise spans a wide range of deposition and surface engineering technologies, including: PVD sputtering, PECVD, Thermal evaporation (e.g., Close-Space Sublimation, CSS), Surface activation and pre-treatment, Wet-chemical and thermal process integration.
In the hydrogen sector, bipolar plates (BPPs) represent a significant portion of the weight and account for a large share of the manufacturing cost of PEM fuel cell and electrolyzer stacks. To enable cost-efficient, high-volume production, advanced coating solutions are essential. These functional coatings directly influence corrosion resistance and interfacial contact resistance—key factors for ensuring long-term durability, high electrical efficiency, and system reliability.
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