Hydrogen Recycling System - 830 slm

  • On-site recycling of hydrogen exhaust gas
  • Recovery and purification of hydrogen to 99.9999 % purity
  • Pressurized hydrogen resupply for reuse
  • Designed specifically for EUV scanner hydrogen recycling

Add to compare

This is a hydrogen recycling system that recovers and purifies process hydrogen from industrial manufacturing processes, such as EUV Scanners, to provide a fresh, pressurized, and cost-effective hydrogen supply. It reduces reliance on trucks and cylinders, offering high purity (99.9999%) and significant cost savings. The system is designed for on-site use, with features like remote monitoring, high system availability (>90%), and compatibility with various industrial applications. It operates by extracting hydrogen from exhaust gas streams, purifying it, and pressurizing it to meet specifications, making it available for reuse at the facility. The system is developed based on a proprietary, low-cost, large format electrochemical platform, originally developed for NASA, and is suitable for industrial gas needs.

Use Cases

  • Recycling hydrogen exhaust from EUV scanners
  • On-site hydrogen reuse in semiconductor manufacturing environments

Capabilities

  • Recycles hydrogen from EUV exhaust streams at flow rates up to 830 slm.
  • Delivers ultra-high-purity hydrogen (99.9999 %, 0.001 ppmv H₂O) suitable for sensitive semiconductor processes.
  • Pressurizes recycled hydrogen to 0–10.3 barg (0–150 psig) for direct reuse.
  • Supports continuous industrial operation with system availability >90 %.
  • Enables remote and local monitoring via Ethernet.
Skyre Inc. Skyre Inc. is a clean-energy technology company that develops advanced systems for hydrogen production, carbon capture, and energy storage. The company focuses on creating sustainable, high-efficiency solutions that help industries reduce emissions and transition to low-carbon operations. Skyre’s innovations support applications in manufacturing, transportation, and renewable energy integration.

Latest products