This is a hydrogen recycling system that recovers and purifies process hydrogen from industrial manufacturing processes, such as EUV Scanners, to provide a fresh, pressurized, and cost-effective hydrogen supply. It reduces reliance on trucks and cylinders, offering high purity (99.9999%) and significant cost savings. The system is designed for on-site use, with features like remote monitoring, high system availability (>90%), and compatibility with various industrial applications. It operates by extracting hydrogen from exhaust gas streams, purifying it, and pressurizing it to meet specifications, making it available for reuse at the facility. The system is developed based on a proprietary, low-cost, large format electrochemical platform, originally developed for NASA, and is suitable for industrial gas needs.
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