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Gas Analyzers

Residual Gas Analyzer – Transpector CPX – 100 AMU

INFICON
Summary

  • AI and Machine Learning Driven Solutions for Smarter Sensors
  • Enhanced Process Control
  • Optimized WIP Scheduling
  • Residual Gas Analysis with High Sensitivity
  • Compact Design with 30% Smaller Footprint

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Description Vendor

The Transpector CPX Residual Gas Analyzer is a compact, advanced process monitoring system designed for semiconductor manufacturing. It offers industry-leading measurement speed and sensitivity, enabling real-time process control and the detection of undesirable variances in atomic layer processes. The system supports a wide range of applications, including atomic layer deposition (ALD), chemical vapor deposition (CVD), and etch processes. Key features include automated calibration, an optional dual-filament ion source for extended uptime, a corrosion-resistant capacitance diaphragm gauge, and integration with FabGuard software for data collection and analysis. It is engineered for reliability, uptime, and versatility in challenging environments, with a 30% reduction in volume compared to previous generations for easier integration. The system also includes a high-performance turbomolecular pump, a field-proven HexBlock inlet system, and robust, field-replaceable components for long-term operation.

Use Cases

  • 300 mm Wafer Degas
  • Advanced Processes including Atomic Layer Deposition (ALD)
  • Etch Processes including metal, dielectric, silicon etch, and high-density plasma etch
  • Chemical Vapor Deposition (CVD) Processes including high-k dielectrics, HDP-CVD, LP-CVD, SA-CVD, CVD low-k, PE-CVD
  • Diffusion and Epitaxy Processes
  • Ion Implantation
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Advanced Systems with industry-leading pumping system and advanced temperature control
  • Smaller Fab Footprint with 30% reduction in system volume
  • Optional Dual Filament Ion Source for extended lifetime and improved tool uptime
  • Configurable HexBlock with up to three pressure inlets for specific pressure ranges
  • Corrosion Resistant Capacitance Diaphragm Gauge (CDG) for monitoring process pressure and protecting the system
  • Automated Calibration for long-term data stability and accuracy
  • Process Integration with FabGuard® software and INFICON world-class applications experts
  • Fast Data Collection with short RF settling times up to 1.8 milliseconds per data point
  • Innovative Electron Multiplier for decreased maintenance downtime and increased tool uptime
  • Turbomolecular Pump for best fit and function with fast pumping and reduced footprint
  • Maximum Uptime with robust, field replaceable ion sources and inlet options
  • Field-Proven Inlet System with adaptable sampling for up to three different process pressures
INFICON

INFICON is a leading provider of advanced instrumentation for hydrogen detection, crucial for the hydrogen economy. They specialize in low-concentration hydrogen leak detection, supporting the transition to a fossil-free future. Their technology is vital for industries aiming for net-zero greenhouse gas goals.

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