Gas Analyzer – 200 AMU

INFICON

Comprehensive Intelligent Manufacturing Systems solutions for electronics manufacturing
Increase capital productivity, labor efficiency, and overall factory efficiency
Real-time process monitoring and data analysis
Predictive applications for factory performance optimization
Smart FDC

The Transpector APX Residual Gas Analyzer is an advanced process monitor designed for semiconductor and display manufacturing, offering industry-leading measurement speed and sensitivity. It is ideal for monitoring complex processes such as ALD, CVD, and etch, helping to minimize scrap and maximize yield in real-time. With features like automated calibration, EUV fab readiness, and a compact footprint, it provides precise trace gas analysis and supports advanced process control and diagnostics through integration with FabGuard software. The analyzer is equipped with innovative inlet and ion source options, allowing it to adapt to various process conditions and chemistries. It delivers fast data collection with industry-leading electronics, enabling data collection speed up to 1.8 milliseconds per data point (approximately 555 data points per second). The Transpector® APX is also designed for maximum uptime with robust, field replaceable components and proprietary coatings for chemical resistance, making it suitable for highly aggressive processes. Its advanced capabilities make it the market-leading Residual Gas Analyzer (RGA) for semiconductor and display process monitoring.

Use Cases

Monitoring advanced processes such as ALD and HDP CVD
Minimizing scrap and maximizing yield in real time for semiconductor processes
Detecting hydrocarbon contamination in EUV fabs
Process integration with FabGuard® software for diagnostics and monitoring
Continuous monitoring for critical process steps in ALD, CVD, and Etch processes
Endpoint detection for ALD and CVD processes
Monitoring 300 mm wafer degas
Ion implantation processes
Detecting contaminants in semiconductor and display manufacturing
Typically used in hydrogen and related industrial applications

Capabilities

Real-time process monitoring
High-speed data collection (up to 555 data points per second)
Precise control over precursor chemical doses
Low detection limits for trace gases
Robust and field replaceable ion sources
Inlet systems designed for aggressive process chemistries
Automated calibration for long-term data stability
Compatibility with EUV fabrication processes
Integration with FabGuard® software for advanced process control

INFICON

INFICON is a leading provider of advanced instrumentation for hydrogen detection, crucial for the hydrogen economy. They specialize in low-concentration hydrogen leak detection, supporting the transition to a fossil-free future. Their technology is vital for industries aiming for net-zero greenhouse gas goals.

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