Gas Analyzer – Transpector CPX – 300 AMU

INFICON

AI and Machine Learning Driven Solutions for Smarter Sensors
Enhanced Process Control
Optimized WIP Scheduling
Smaller Fab Footprint with 30% Volume Reduction
Corrosion Resistant Capacitance Diaphragm Gauge (CDG)

The Transpector CPX Residual Gas Analyzer is a compact, advanced process monitoring tool designed for semiconductor manufacturing. It offers industry-leading measurement speed and sensitivity, enabling real-time monitoring of atomic layer processes and detection of undesirable variances. With features like an optional dual-filament ion source, automated calibration, and integration with FabGuard software, it maximizes uptime and provides reliable, versatile process monitoring. The system is ideal for applications such as 300 mm wafer degas, atomic layer deposition (ALD), chemical vapor deposition (CVD), and more, ensuring high yield and process control. It is designed with a 30% smaller footprint compared to previous generations, making it easier to integrate into space-constrained applications. The system includes a corrosion-resistant capacitance diaphragm gauge (CDG), a turbomolecular pump for fast pumping, and a configurable HexBlock inlet system for adaptability to various process pressures. Its advanced systems and process integration capabilities make it a powerful tool for real-time process monitoring and diagnostics.

Use Cases

300 mm Wafer Degas
Advanced Processes including Atomic Layer Deposition (ALD)
Etch Processes including metal, dielectric, silicon etch, and high-density plasma etch
Chemical Vapor Deposition (CVD) Processes including high-k dielectrics, HDP-CVD, LP-CVD, SA-CVD, CVD low-k, PE-CVD
Diffusion and Epitaxy Processes
Ion Implantation
Typically used in hydrogen and related industrial applications

Capabilities

Advanced Systems with industry-leading pumping system and advanced temperature control
Smaller Fab Footprint with 30% reduction in system volume
Optional Dual Filament Ion Source for extended lifetime and improved tool uptime
Configurable HexBlock with up to three pressure inlets for specific pressure ranges
Corrosion Resistant Capacitance Diaphragm Gauge (CDG) for monitoring process pressure and protecting the system
Automated Calibration for long-term data stability and accuracy
Process Integration with FabGuard® software and INFICON applications experts
Fast Data Collection with short RF settling times up to 1.8 milliseconds per data point
Innovative Electron Multiplier for decreased maintenance downtime and increased tool uptime
Turbomolecular Pump for best fit and function with fast pumping and reduced footprint
Maximum Uptime with robust, field replaceable ion sources and inlet options
Field-Proven Inlet System with adaptable sampling for up to three different process pressures

INFICON

INFICON is a leading provider of advanced instrumentation for hydrogen detection, crucial for the hydrogen economy. They specialize in low-concentration hydrogen leak detection, supporting the transition to a fossil-free future. Their technology is vital for industries aiming for net-zero greenhouse gas goals.

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