Residual Gas Analyzer – Transpector APX – 300 AMU

INFICON

Comprehensive Intelligent Manufacturing Systems solutions for electronics manufacturing
Increases capital productivity, labor efficiency, and overall factory efficiency
Real-time process monitoring and data analysis
Offers a holistic digital twin for factory data integration
Includes AI/ML for data transformation and process control

The Transpector APX Residual Gas Analyzer is an advanced process monitor designed for semiconductor and display manufacturing, specifically for ALD (Atomic Layer Deposition), CVD (Chemical Vapor Deposition), and etch processes. It offers industry-leading measurement speed and sensitivity, enabling real-time monitoring and optimization of complex processes. With features like automated calibration, EUV fab readiness, and a compact design, it minimizes scrap and maximizes yield while ensuring high uptime and precision in trace gas analysis. The analyzer is ideal for monitoring advanced processes such as ALD and HDP CVD, providing critical insights for process control and diagnostics. Its innovative inlet and ion source options, along with proprietary coatings, ensure compatibility with aggressive process chemistries, enhancing reliability and performance in semiconductor manufacturing.

Use Cases

Monitoring advanced processes such as ALD and HDP CVD
Minimizing scrap and maximizing yield in real time for semiconductor processes
Process integration with FabGuard® software for process monitoring and diagnostics
Contamination monitoring for EUV fabs
Detecting hydrocarbon contamination in EUV fabs
Monitoring etch processes including metal, dielectric, silicon etch, and high density plasma etch
Monitoring CVD processes including high k dielectrics, HDP CVD, LP CVD, SA CVD, CVD low k, PE CVD
Monitoring diffusion and epitaxy processes
300 mm wafer degas
Ion implantation
Typically used in hydrogen and related industrial applications

Capabilities

Precision measurement for advanced semiconductor processes
Fast data collection with industry-leading speed
Automated calibration for long-term data stability and accuracy
EUV fab readiness with low hydrocarbon detection limits
Longest mean time to maintenance process monitoring system
Field replaceable ion sources and inlet options
Proprietary system coatings for chemical resistance
Integration with FabGuard® software for advanced process control and diagnostics
Support for a wide range of process conditions with configurable inlet systems
High performance pumping system for reduced footprint and improved detection limits

INFICON

INFICON is a leading provider of advanced instrumentation for hydrogen detection, crucial for the hydrogen economy. They specialize in low-concentration hydrogen leak detection, supporting the transition to a fossil-free future. Their technology is vital for industries aiming for net-zero greenhouse gas goals.

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