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Home
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Hydrogen Leak Detectors

Mobile Helium Leak Detector – UL3000

INFICON
Summary

  • High-speed leak detection
  • Intelligent background suppression for improved measurement accuracy
  • Applicable for vacuum and sniffer leak detection
  • User-friendly HMI with full-color high-resolution rotatable display
  • Remote control via mobile device using Wi-Fi

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Description Vendor

The UL3000 Fab (ULTRA) Mobile Helium Leak Detector is a cutting-edge device designed specifically for semiconductor manufacturing environments. It combines advanced ULTRATEST sensor technology with a robust design to deliver high-speed, accurate leak detection. The device is equipped with HYDRO-S software, which eliminates water vapor background, enabling quicker and more sensitive measurements. It features a high-resolution touch display, intuitive user interface, and remote control capabilities via Wi-Fi. The device is compact, easy to maneuver, and includes a robust ion source with a 3-year warranty, ensuring low total cost of ownership. It is ideal for detecting leaks in vacuum systems, gas delivery lines, and various process tools in semiconductor fabrication facilities.

Use Cases

  • Leak checking of semiconductor and display tools, including subcomponents
  • Vacuum lines and pumps in sub fab
  • Gas cabinets and complex gas delivery lines
  • Fab facilities and abatement
  • Quick confirmation of tool integrity and pinpoint leaks to be fixed after tool maintenance
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Save Time with I-CAL software algorithm for fast measurements in the range of 10^-8 to 10^-12 mbar l/s
  • Most efficient leak checking using I-ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
  • Applicable for vacuum and sniffer leak search
  • Minimize leak checking efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display
  • Start leak checking earlier as HYDRO-S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • Faster pump down (evacuation) times due to higher air pumping speed
  • Lower TCO due to maintenance free roots roughing pump
  • Intuitive user guidance with touch display
  • Modern menu structure
  • Rotatable full color high resolution display
  • Remote control by mobile device via Wi-Fi
  • Data storage capability
  • Data export using USB stick (access controlled)
  • Robust vacuum system
  • Ruggedized ion source with 3-year warranty
  • Small and ruggedized design for stability and optimal mobility
  • Easy handling with low center of gravity
  • Big wheels easily overcome obstacles
  • 180° mass spectrometer
  • All components made of stainless steel
  • Pre-amplifier with highest sensitivity in industry
INFICON

INFICON is a leading provider of advanced instrumentation for hydrogen detection, crucial for the hydrogen economy. They specialize in low-concentration hydrogen leak detection, supporting the transition to a fossil-free future. Their technology is vital for industries aiming for net-zero greenhouse gas goals.

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