Hydrogen Gas Filter – MegaTorr PS7-H

Entegris, Inc.

Efficient bulk gas removal of H2O, O2, CO, CO2, THC, and N2
Sub-ppb performance in compact footprints
Ultra-high purity hydrogen gas for semiconductor applications
Continuous purification in a single process
Automated microprocessor controller

The MegaTorr PS7-H Hydrogen Gas Purifiers are advanced systems designed for efficient bulk gas removal of H2O, O2, CO, CO2, THC, and N2. These purifiers utilize a combination of heated getter and ambient catalytic adsorption processes to deliver ultra-high purity hydrogen gas, essential for semiconductor applications. They offer sub-ppb performance in compact footprints, with flow rates up to 3,333 slpm. The purifiers are optimized for low capital cost, high reliability, and high performance, featuring automated microprocessor control, touchscreen operation, and a range of standard and optional features such as system alarms, temperature interlocks, and redundant heating elements.

Use Cases

Semiconductor
Data storage
Flat panel display
LED
Solar
Photolithography gas purification
Semiconductor wafer manufacturing (front-end-of-line)
Flat panel display (FPD) manufacturing
Analytical laboratory instrument calibration (GC-MS, ICP-MS)
Thin film deposition processes (CVD and PVD)
Typically used in hydrogen and related industrial applications
Cryogenic research requiring sub-ppb impurity levels

Capabilities

Provide ultra-high purity hydrogen gas for semiconductor applications
Provide continuous purification in a single process
Provides sub-ppb performance in small footprints with flow rates up to 3,333 slpm (200 Nm³/hr)

Entegris, Inc. Entegris provides advanced materials and purification solutions, including cryogenic hydrogen gas purifiers, crucial for the hydrogen economy. The company focuses on high-purity materials to support clean energy technologies. Entegriss innovations help reduce impurities in hydrogen production processes.

First name

Last name

Company

Country

Quantity

Business e-mail

Message to vendor

I consent to the privacy policy and terms of use.*

This site is protected by reCAPTCHA and the Google privacy policy and terms of service apply.

Latest products

AEM Electrolysers AEM Electrolyzer System for Hydrogen Production - WS-2000L By Shenzhen Wenshi Hydrogen Energy Ltd.

Catalysts Platinum-Based Fuel Cell Catalysts By Shanghai Tangfeng Energy Technology Co., Ltd.

Catalysts Iridium-Based Water Electrolysis Catalysts By Shanghai Tangfeng Energy Technology Co., Ltd.

Membrane Electrode Assembly Air-cooled PEM Fuel Cell Membrane Electrode Assemblies By Shanghai Tangfeng Energy Technology Co., Ltd.

Membrane Electrode Assembly PEM Water Electrolysis Membrane Electrode Assemblies By Shanghai Tangfeng Energy Technology Co., Ltd.

Membrane Electrode Assembly Liquid-cooled PEM Fuel Cell Membrane Electrode Assemblies By Shanghai Tangfeng Energy Technology Co., Ltd.

Cell Voltage Monitors Wireless cell voltage monitoring – DILICO cell voltage pickup By DILICO engineering GmbH

Fuel Cell Air Compressors Turbo Compressor CTi-110x with integrated electronics By Celeroton TurboCell AG

Pressure Gauges JUMO safetyM TA - Multifunctional safety limit switch with fault tolerance By JUMO GmbH & Co. KG

Hydrogen Treatment Systems H₂ Conditioning & Dosing for Jet Engines By BRIGHT Group

Engineering Services 3D-Printed Graphite and SiC Reactors for CO₂-Free Hydrogen Production By BRIGHT Group

Hydrogen Treatment Systems H₂ Conditioning for Internal Combustion Engines By BRIGHT Group