Hydrogen Filter – Rare Gas Purifier

Entegris, Inc.

Ultra-high purity (UHP) gas for semiconductor applications
Removes impurities to low parts per billion (ppb) levels or below
Getter-based technology with patented alloy for irreversible chemical bonds
Continuous supply of ultra pure gas at rated flows until cartridge replacement
Life status indicator with audible alarm for approaching depletion

The Entegris MonoTorr Phase II, Rare Gas and Nitrogen Purifier is a getter-based purifier designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. It removes impurities by forming irreversible chemical bonds through a patented getter alloy operated at elevated temperatures, ensuring outlet impurity levels for O2, H2O, CO, CO2, H2, CH4, and N2 (for rare gas only) are reduced to low parts per billion (ppb) levels or below. It continuously supplies ultra pure gas at rated flows provided that inlet impurities are within specified levels, until getter cartridge replacement is necessary. The purifier features a life status indicator, heater status, temperature display, valve control, and alarm systems to ensure optimal performance and safety. It is available in two flow rates: 50 slpm (MT3) and 75 slpm (MT15), with specifications for maximum pressure drop, inlet gas temperature range, and outlet gas temperature. The purifier is designed to operate with inlet gas purity of 99.999% and guarantees outlet purity for various impurities, making it ideal for applications requiring high-purity gas.

Use Cases

Semiconductor applications
Photolithography gas purification
High-brightness LED production
Flat panel display (FPD) manufacturing
Solar/Photovoltaic cell fabrication
Fiber optic cable manufacturing
Analytical laboratory instrument calibration (GC-MS, ICP-MS)
Typically used in hydrogen and related industrial applications
Cryogenic research requiring sub-ppb impurity levels

Capabilities

Continuous supply of ultra pure gas at rated flows
Indicates life status of the purifier
Monitors heater status
Displays temperature
Controls pneumatic valves
Provides alarms for various conditions
Activates heater when no alarms exist
Positions valve to purify or bypass mode
Checks LED functionality
Silences audible alarm and restores operation

Entegris, Inc. Entegris provides advanced materials and purification solutions, including cryogenic hydrogen gas purifiers, crucial for the hydrogen economy. The company focuses on high-purity materials to support clean energy technologies. Entegriss innovations help reduce impurities in hydrogen production processes.

First name

Last name

Company

Country

Quantity

Business e-mail

Message to vendor

I consent to the privacy policy and terms of use.*

This site is protected by reCAPTCHA and the Google privacy policy and terms of service apply.

Latest products

AEM Electrolysers AEM Electrolyzer System for Hydrogen Production - WS-2000L By Shenzhen Wenshi Hydrogen Energy Ltd.

Catalysts Platinum-Based Fuel Cell Catalysts By Shanghai Tangfeng Energy Technology Co., Ltd.

Catalysts Iridium-Based Water Electrolysis Catalysts By Shanghai Tangfeng Energy Technology Co., Ltd.

Membrane Electrode Assembly Air-cooled PEM Fuel Cell Membrane Electrode Assemblies By Shanghai Tangfeng Energy Technology Co., Ltd.

Membrane Electrode Assembly PEM Water Electrolysis Membrane Electrode Assemblies By Shanghai Tangfeng Energy Technology Co., Ltd.

Membrane Electrode Assembly Liquid-cooled PEM Fuel Cell Membrane Electrode Assemblies By Shanghai Tangfeng Energy Technology Co., Ltd.

Cell Voltage Monitors Wireless cell voltage monitoring – DILICO cell voltage pickup By DILICO engineering GmbH

Fuel Cell Air Compressors Turbo Compressor CTi-110x with integrated electronics By Celeroton TurboCell AG

Pressure Gauges JUMO safetyM TA - Multifunctional safety limit switch with fault tolerance By JUMO GmbH & Co. KG

Hydrogen Treatment Systems H₂ Conditioning & Dosing for Jet Engines By BRIGHT Group

Engineering Services 3D-Printed Graphite and SiC Reactors for CO₂-Free Hydrogen Production By BRIGHT Group

Hydrogen Treatment Systems H₂ Conditioning for Internal Combustion Engines By BRIGHT Group