Hydrogen Filter – MegaTorr PS7-A

Entegris, Inc.

Efficient bulk gas removal of H2O, O2, CO, CO2, and NMHC impurities
Ultra-high purity hydrogen gas for semiconductor applications
Auto regenerable design
Two adsorber vessels alternate between purify and regeneration modes
Automated microprocessor controller
H2 leak detection sensor
Ultrafine 0.003 µm particle filter

The MegaTorr PS7-A Hydrogen Gas Purifiers are advanced, auto-regenerable systems designed for efficient bulk gas removal of impurities such as H2O, O2, CO, CO2, and NMHC. These purifiers provide sub-ppb performance in compact footprints, making them ideal for applications requiring ultra-high purity (UHP) hydrogen gas. They utilize adsorption processes with two alternating adsorber vessels to ensure continuous purification. The system is optimized for flow rates up to 16,667 slpm and is engineered with integrated control systems, advanced process material analysis, and high reliability. The purifiers are suitable for semiconductor manufacturing, data storage, flat panel displays, LEDs, and solar industries, offering low capital cost and high performance.

Use Cases

Semiconductor
Data storage
Flat panel display
LED
Solar
Typically used in hydrogen and related industrial applications

Capabilities

Provide ultra-high purity hydrogen gas for semiconductor applications
Provide continuous purification in a single process
Provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)
Ultrafine 0.003 µm particle filter

Entegris, Inc. Entegris provides advanced materials and purification solutions, including cryogenic hydrogen gas purifiers, crucial for the hydrogen economy. The company focuses on high-purity materials to support clean energy technologies. Entegriss innovations help reduce impurities in hydrogen production processes.

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