Hydrogen Filter – Gas Purifier, 20-60 HX Series

Entegris, Inc.

Continuous high-flow
Purifies to parts-per-trillion (ppt) levels
Ambient temperature purification means lower energy costs and resource conservation
Designed for easy field maintenance and upgrades
Available worldwide through Entegris global infrastructure
Power failure will not damage the purification system
CE, CSEI (China), and SEMI certified

The Gate Keeper Gas Purification System (GPS), HX series, is the latest continuous service gas purification system from Entegris. It delivers purified hydrogen, nitrogen, or argon gas to critical applications such as semiconductor and LED production. The system uses ambient temperature purification, eliminating the need for heating, and effectively removes contaminants like moisture, oxygen, carbon monoxide, and non-methane hydrocarbons. It offers parts-per-trillion (ppt) purity levels, low pressure drop, self-regenerating purifiers, and remote monitoring capabilities. The system is designed for easy maintenance and is available worldwide through Entegris global infrastructure.

Use Cases

Metal organic chemical vapor deposition (MOCVD)
Applications that require ultra-pure hydrogen, nitrogen, or argon gas
Atomic layer deposition (ALD)
Low temperature epitaxy (LTE)
Typically used in hydrogen and related industrial applications

Capabilities

Purifies to parts-per-trillion (ppt) levels
Low pressure drop means no changes to inlet pressure are required
Self-regenerating purifiers provide the lowest cost of ownership
Ambient temperature purification means lower energy costs and resource conservation
Ethernet connection allows for remote monitoring capability
Designed for easy field maintenance and upgrades

Entegris, Inc. Entegris provides advanced materials and purification solutions, including cryogenic hydrogen gas purifiers, crucial for the hydrogen economy. The company focuses on high-purity materials to support clean energy technologies. Entegriss innovations help reduce impurities in hydrogen production processes.

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