Hydrogen Filter – 50 HX Series

Entegris, Inc.

Continuous high-flow
Purifies to parts-per-trillion (ppt) levels
Ambient temperature purification with lower energy costs and resource conservation
Designed for easy field maintenance and upgrades
Available worldwide through Entegris global infrastructure

The GateKeeper Gas Purification System, 20-60 HX Series, is an advanced continuous service gas purification system designed for semiconductor manufacturers. It provides purified hydrogen, nitrogen, or argon gas at a low cost of ownership and is suitable for critical applications such as semiconductor and LED production. The system features an ultra-small footprint and compact design, requiring minimal fab floor space and allowing easy access to serviceable components. It uses ambient temperature purification, eliminating the need for heating and reducing energy costs. The system effectively removes contaminants like moisture, oxygen, carbon monoxide, carbon dioxide, and non-methane hydrocarbons from nitrogen, hydrogen, and argon gas, achieving outlet purity in parts-per-trillion (ppt) levels. It is CE, CSEI (China), and SEMI certified, with an Ethernet connection for remote monitoring and easy field maintenance and upgrades. The system is available in various models (GPS20HX, GPS30HX, GPS50HX, GPS60HX) with different flow rates and specifications, and it includes safety features like an EMO button, remote EMO activation, and visual and audible alarms.

Use Cases

Metal organic chemical vapor deposition (MOCVD)
Applications that require ultra-pure hydrogen, nitrogen, or argon gas
Atomic layer deposition (ALD)
Low temperature epitaxy (LTE)
Typically used in hydrogen and related industrial applications

Capabilities

Purifies to parts-per-trillion (ppt) levels
Low pressure drop means no changes to inlet pressure are required
Self-regenerating purifiers provide the lowest cost of ownership
Ambient temperature purification means lower energy costs and resource conservation
CE, CSEI (China), and SEMI® certified
Ethernet connection allows for remote monitoring capability
Designed for easy field maintenance and upgrades

Entegris, Inc. Entegris provides advanced materials and purification solutions, including cryogenic hydrogen gas purifiers, crucial for the hydrogen economy. The company focuses on high-purity materials to support clean energy technologies. Entegriss innovations help reduce impurities in hydrogen production processes.

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