Hydrogen Filter – 20-60 HX Series

Entegris, Inc.

Efficient bulk gas removal of H2O, O2, CO, CO2, THC, and N2 impurities
Sub-ppb performance in compact footprints
Ultra-high purity hydrogen gas for semiconductor applications
Continuous purification with two adsorber vessels alternating between purify and regeneration modes
Automated microprocessor controller

The GateKeeper Gas Purification System, 20-60 HX Series, is an advanced continuous service gas purification system designed for semiconductor manufacturers. It provides purified hydrogen, nitrogen, or argon gas at a low cost of ownership and is suitable for critical applications such as semiconductor and LED production. The system features an ultra-small footprint and compact design, requiring minimal fab floor space and allowing easy access to serviceable components. It uses ambient temperature purification, eliminating the need for heating and reducing energy costs. The system effectively removes contaminants like moisture, oxygen, carbon monoxide, carbon dioxide, and non-methane hydrocarbons from nitrogen, hydrogen, and argon gas, achieving outlet purity in parts-per-trillion (ppt) levels. It is CE, CSEI (China), and SEMI certified, with an Ethernet connection for remote monitoring and easy field maintenance and upgrades. The system is available in various models (GPS20HX, GPS30HX, GPS50HX, GPS60HX) with different flow rates and specifications, and it includes safety features like an EMO button, remote EMO activation, and visual and audible alarms.

Use Cases

Semiconductor
Data storage
Flat panel display
LED
Solar
Typically used in hydrogen and related industrial applications

Capabilities

Provide ultra-high purity hydrogen gas for semiconductor applications
Provide continuous purification in a single process
Provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)

Entegris, Inc. Entegris provides advanced materials and purification solutions, including cryogenic hydrogen gas purifiers, crucial for the hydrogen economy. The company focuses on high-purity materials to support clean energy technologies. Entegriss innovations help reduce impurities in hydrogen production processes.

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