Gas Analyzer – Transpector APX-100 AMU

INFICON

Comprehensive Intelligent Manufacturing Systems solutions for electronics manufacturing
Real-time process monitoring and data analysis
Predictive applications for optimizing factory performance
Smart FDC
High sensitivity and fast data collection

The Transpector APX Residual Gas Analyzer is an advanced process monitor designed for semiconductor and display manufacturing processes such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and etch. It offers industry-leading measurement speed and sensitivity, enabling real-time monitoring and optimization of complex processes. With features like automated calibration, EUV fab readiness, and a compact design, it minimizes scrap and maximizes yield while ensuring high uptime and precision in trace gas analysis. The analyzer is ideal for monitoring advanced processes such as ALD and HDP CVD, providing critical data for process control and diagnostics. It is equipped with innovative inlet and ion source options, proprietary coatings for chemical resistance, and integration with FabGuard software for advanced process monitoring and diagnostics.

Use Cases

Monitoring advanced processes such as ALD and HDP CVD
Minimizing scrap and maximizing yield in real time for semiconductor processes
Detecting hydrocarbon contamination in EUV fabs
Process integration with FabGuard® software for diagnostics and monitoring
Continuous monitoring for critical process steps in ALD, CVD, and Etch processes
Endpoint detection for ALD and CVD processes
Monitoring 300 mm wafer degas
Ion implantation processes
Detecting contaminants in semiconductor and display manufacturing
Typically used in hydrogen and related industrial applications

Capabilities

Real-time process monitoring
High-speed data collection (up to 555 data points per second)
Precise control over precursor chemical doses
Automated calibration for long-term data stability
EUV fab readiness with low hydrocarbon detection limits
Field replaceable ion sources and electron multiplier
Configurable inlet systems for various pressure ranges
Proprietary coatings for chemical resistance
Integration with FabGuard® software for advanced process control

INFICON

INFICON is a leading provider of advanced instrumentation for hydrogen detection, crucial for the hydrogen economy. They specialize in low-concentration hydrogen leak detection, supporting the transition to a fossil-free future. Their technology is vital for industries aiming for net-zero greenhouse gas goals.

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